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Fabrication of Fine Electrodes on the Tip of Hypodermic Needle Using Photoresist Spray Coating and Flexible Photomask for Biomedical Applications
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神经科学
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JoVE 杂志 神经科学
Fabrication of Fine Electrodes on the Tip of Hypodermic Needle Using Photoresist Spray Coating and Flexible Photomask for Biomedical Applications

Fabrication of Fine Electrodes on the Tip of Hypodermic Needle Using Photoresist Spray Coating and Flexible Photomask for Biomedical Applications

DOI:
10.3791/56622-v

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08:15 min

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November 28, 2017

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, ,
1Department of Biomedical Science and Engineering,Gwangju Institute of Science and Technology (GIST), 2School of Mechanical Engineering,Gwangju Institute of Science and Technology (GIST)

Chapters

  • 00:05Title
  • 00:50Needle Preparation: Insulation, Sputtering, and Spray Coating
  • 02:59UV Exposure and Developing
  • 04:24Chromium/Gold Wet Etching and Removal of Residual Photoresist and Passivation
  • 05:44Results: Fine Electrode Fabrication
  • 07:33Conclusion

Summary

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The fabrication method for fine interdigitated electrodes (gap and width: 20 µm) at the tip of a hypodermic needle (diameter: 720 µm) is demonstrated using a spray coating and flexible film photomask in the photolithography process.

Tags

FabricationFine ElectrodesHypodermic NeedlePhotoresistSpray CoatingFlexible PhotomaskBiomedical ApplicationsMicro Diode SensorDrug DeliveryBiopsySurgeryCauterizing ElectrophotometerHeat Shrink TubeSputteringChromiumGoldSoft BakingPhotolithographyAlignmentCCD Display Monitor

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