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Fabrication of Ultra-thin Color Films with Highly Absorbing Media Using Oblique Angle Deposition
 

Fabrication of Ultra-thin Color Films with Highly Absorbing Media Using Oblique Angle Deposition

Article DOI: 10.3791/56383-v • 06:30 min • August 29th, 2017
August 29th, 2017 •
1, 1, 2, 1
1School of Electrical Engineering and Computer Science, Gwangju Institute of Science and Technology, 2Department of Robotics Engineering, Daegu Gyeongbuk Institute of Science and Technology

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We present a detailed method for fabricating ultra-thin color films with improved characteristics for optical coatings. The oblique angle deposition technique using an electron beam evaporator allows improved color tunability and purity. Fabricated films of Ge and Au on Si substrates were analyzed by reflectance measurements and color information conversion.

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Ultra-thin Color Films Highly Absorbing Media Oblique Angle Deposition Porosity Control Color Purity Tunability Nanofabrication Semiconductors Flex Electrodes Optical Resonance Applications Silicon Wafers Buffered Oxide Etchant PTFE Dipper Cleaning Jig Sonicate Acetone Isopropanol Deionized Water Nitrogen Blowgun Electron Beam Evaporator Titanium Source Gold Source
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