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锗通过原子层沉积钙钛矿型钛酸锶的外延生长
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Epitaxial Growth of Perovskite Strontium Titanate on Germanium via Atomic Layer Deposition
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锗通过原子层沉积钙钛矿型钛酸锶的外延生长

DOI:
10.3791/54268-v

•

09:45 min

•

July 26, 2016

•

, , ,
1McKetta Department of Chemical Engineering,The University of Texas at Austin

Capítulos

  • 00:05Título
  • 01:20Cleaning the Germanium Substrate
  • 02:46Loading to the Vacuum System and Germanium Deoxidization
  • 04:30Thin Film ALD Growth and Annealing of the Strontium Titanate (STO) Film
  • 07:23Results: RHEED and X-ray Diffraction Analysis
  • 08:41Conclusion

Summary

Tadução automática

Tadução automática

这个工作详细直接结晶的SrTiO 3的锗基板通过原子层沉积的生长和表征的程序。该过程示出了一个全化学生长方法来单片集成氧化物到半导体金属氧化物半导体器件的能力。

Tags

Epitaxial GrowthPerovskiteStrontium TitanateGermaniumAtomic Layer DepositionMicroelectronicsDielectricCrystalline OxidesInterface StatesManufacturingPrecursorsMolecular Beam EpitaxySubstrate CleaningUV Ozone CleaningVacuum System

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