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パルスレーザー蒸着法によるナノエンジニアリング透明導電性酸化物の作製
JoVE Journal
Engenharia
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JoVE Journal Engenharia
Fabrication of Nano-engineered Transparent Conducting Oxides by Pulsed Laser Deposition
DOI:

10:27 min

February 27, 2013

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Capítulos

  • 00:05Título
  • 01:30Substrate Preparation
  • 02:01Laser Alignment and Selection of Laser Parameters
  • 03:33Target Alignment, Pre-ablation and Data Collection for Plasma Plume Length Determination
  • 04:51Calibration of the Film Thickness
  • 05:58Deposition of Compact AZO Films
  • 07:25Deposition of Hierarchically Structured AZO Films
  • 08:08Results: Compact and Forest-like AZO Films and Their Properties
  • 09:39Conclusion

Summary

Tadução automática

我々は、バックグラウンドガスの存在下でナノ秒パルスレーザー堆積(PLD)法によるナノ構造酸化物薄膜を堆積させるための実験方法を説明します。この方法AlドープZnO(AZO)膜を用いて、ナノツリー林の階層構造にコンパクトから、堆積させることができる。

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