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Journal / Engineering / Deposition of Bi2Te3 and Sb2Te3 Thin Films on… / 玻璃基板上Bi2te3 和Sb2te3…
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玻璃基板上Bi2te3 和Sb2te3 热电薄膜的射频磁控溅射
 
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玻璃基板上Bi2te3 和Sb2te3 热电薄膜的射频磁控溅射

Deposition of Bi2Te3 and Sb2Te3 Thin Films on Glass Substrates via RF Sputtering

Article DOI: 10.3791/201298-v • 03:39 min • May 17th, 2024
May 17th, 2024 •
1, 1, 1, 1, 2, 1
1Solar Energy Research Institute (SERI), Universiti Kebangsaan Malaysia, 2Faculty of Science and Technology, Universiti Sains Islam Malaysia

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《工程》，第207期，
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