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活性溅射沉积的氧化氮薄膜：氧气流速效应
JoVE Journal
Chimica
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JoVE Journal Chimica
Niobium Oxide Films Deposited by Reactive Sputtering: Effect of Oxygen Flow Rate
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活性溅射沉积的氧化氮薄膜：氧气流速效应

7,090 Views

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08:23 min

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September 28, 2019

DOI:

10.3791/59929-v

DOI:
10.3791/59929-v

•

08:23 min
September 28, 2019

•

8 Views
, , , , ,
1Chemistry Department,Federal University of São Carlos (UFSCAR), 2Physics Department, School of Sciences,São Paulo State University (UNESP)

Summary

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在这里，我们提出了一个协议，通过反应溅射以不同的氧气流速沉积氧化氮薄膜，作为在perovskite太阳能电池中的电子传输层。

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Cite this Article

Fernandes, S. L., Affonço, L. J., Junior, R. A. R., da Silva, J. H. D., Longo, E., Graeff, C. F. d. O. Niobium Oxide Films Deposited by Reactive Sputtering: Effect of Oxygen Flow Rate. J. Vis. Exp. (151), e59929, doi:10.3791/59929 (2019).

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