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3D碳微机电系统（C-MEMS）的制造

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Ingegneria

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Fabrication of 3D Carbon Microelectromechanical Systems (C-MEMS)

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3D碳微机电系统（C-MEMS）的制造

11,953 Views

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08:01 min

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June 17, 2017

DOI:

10.3791/55649-v

DOI:

10.3791/55649-v

•

08:01 min

June 17, 2017

•

2 Views

Bidhan Pramanick¹, Sergio O. Martinez-Chapa¹, Marc Madou^1,2, Hyundoo Hwang^1,3

¹School of Engineering and Sciences,Tecnologico de Monterrey, ²Department of Mechanical and Aerospace Engineering,University of California, ³BBB Inc

Summary

基于天然产物，人发的热解制造长而中空的玻璃碳微纤维。碳微机电和碳纳米机电系统或C-MEMS和C-NEMS的两个制造步骤是：（i）富碳聚合物前体的光刻和（ii）图案化聚合物前体的热解。

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