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화학 용액 증착에 의해 실리콘에 거대 다공성 에피 택셜 석영 필름의 제조
JoVE Journal
Chimica
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JoVE Journal Chimica
Preparation of Macroporous Epitaxial Quartz Films on Silicon by Chemical Solution Deposition
DOI:

07:37 min

December 21, 2015

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Capitoli

  • 00:05Titolo
  • 01:11Preparation of the Sol
  • 02:43Gel Film Deposition on Si(100) Substrates
  • 04:04Gel Film Crystallization by Thermal Treatment
  • 04:55Results: Characterization of Macroporous Epitaxial Quartz Films
  • 06:30Conclusion

Summary

Traduzione automatica

A protocol is presented for the preparation of piezoelectric macroporous epitaxial films of quartz on silicon by solution chemistry using dip-coating and thermal treatments in air.

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