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制备纳米设计的脉冲激光沉积透明导电氧化物
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Fabrication of Nano-engineered Transparent Conducting Oxides by Pulsed Laser Deposition
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制备纳米设计的脉冲激光沉积透明导电氧化物

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10:27 min

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February 27, 2013

DOI:

10.3791/50297-v

DOI:
10.3791/50297-v

•

10:27 min
February 27, 2013

•

1 Views
, , , ,
1Department of Energy and NEMAS – Center for NanoEngineered Materials and Surfaces,Politecnico di Milano, 2Center for Nano Science and Technology,Instituto Italiano di Tecnologia

Summary

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我们描述了实验的背景气体的存在下，在纳秒的脉冲激光沉积（PLD）方法来沉积纳米结构的氧化物薄膜。通过使用此方法的掺Al的ZnO（AZO）膜，从紧凑型分层结构为纳米树森林，可以沉积。

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Cite this Article

Gondoni, P., Ghidelli, M., Di Fonzo, F., Li Bassi, A., Casari, C. S. Fabrication of Nano-engineered Transparent Conducting Oxides by Pulsed Laser Deposition. J. Vis. Exp. (72), e50297, doi:10.3791/50297 (2013).

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