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Quantitative Atomic-Site Analysis of Functional Dopants/Point Defects in Crystalline Materials by Electron-Channeling-Enhanced Microanalysis
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May 10, 2021
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We provide a general outline of quantitative microanalysis methods for estimating the site occupancies of impurities and their chemical states by taking advantage of electron-channeling phenomena under incident electron beam-rocking conditions, which reliably extract information from minority species, light elements, oxygen vacancies, and other point/line/planar defects.
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Quantitative AnalysisAtomic-siteFunctional DopantsPoint DefectsCrystalline MaterialsElectron-channeling-enhanced MicroanalysisEnergy-dispersive X-ray SpectroscopyElectron Energy-loss SpectroscopyLattice DefectsVacanciesInterstitialsGrain BoundariesTransmission Electron MicroscopySTEMOptical Axis AlignmentBeam RockingCaustic SpotCondenser Aperture
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Ohtsuka, M., Muto, S. Quantitative Atomic-Site Analysis of Functional Dopants/Point Defects in Crystalline Materials by Electron-Channeling-Enhanced Microanalysis. J. Vis. Exp. (171), e62015, doi:10.3791/62015 (2021).
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