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等离子体辅助分子束外延法制备的锌极性 BeMgZnO/氧化锌异质结构肖特基二极管的制备
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October 23, 2018
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实现高品质肖特基接触是异质结构场效应晶体管 (HFETs) 实现高效栅极调制的必要条件。本文介绍了基于 GaN 模板的等离子体辅助分子束外延生长的高浓度二维电子气体 (2DEG) 的锌极性 BeMgZnO/氧化锌异质结构中肖特基二极管的制备方法和特点。
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Ding, K., Avrutin, V., Izioumskaia, N., Ullah, M. B., Özgür, Ü., Morkoç, H. Fabrication of Schottky Diodes on Zn-polar BeMgZnO/ZnO Heterostructure Grown by Plasma-assisted Molecular Beam Epitaxy. J. Vis. Exp. (140), e58113, doi:10.3791/58113 (2018).
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