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Preparación de gran superficie 2D cristal Hetero-estructuras verticales por el Sulfurization de películas de Metal de la transición para la fabricación de dispositivos
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Preparation of Large-area Vertical 2D Crystal Hetero-structures Through the Sulfurization of Transition Metal Films for Device Fabrication
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Preparación de gran superficie 2D cristal Hetero-estructuras verticales por el Sulfurization de películas de Metal de la transición para la fabricación de dispositivos

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08:50 min

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November 28, 2017

DOI:

10.3791/56494-v

DOI:
10.3791/56494-v

•

08:50 min
November 28, 2017

•

1 Views
, , ,
1Graduate Institute of Electronics Engineering,National Taiwan University, 2Research Center for Applied Sciences,Academia Sinica, 3Graduate Institute of Photonics and Optoelectronics,National Taiwan University

Tags

2D Crystal HeterostructuresVertical 2D MaterialsSulfurizationTransition Metal FilmsDevice FabricationRF SputteringSapphire SubstrateMolybdenum TargetSulfur PowderTube FurnaceArgon GasMolybdenum DisulfideTungsten Target

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Wu, C., Chu, T., Chen, K., Lin, S. Preparation of Large-area Vertical 2D Crystal Hetero-structures Through the Sulfurization of Transition Metal Films for Device Fabrication. J. Vis. Exp. (129), e56494, doi:10.3791/56494 (2017).

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