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Herstellung von großflächigen vertikale 2D Crystal Hetero-Strukturen durch Sulfurization Übergangsmetall Filme für Gerät Herstellung

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Ingénierie

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Journal JoVE Ingénierie

Preparation of Large-area Vertical 2D Crystal Hetero-structures Through the Sulfurization of Transition Metal Films for Device Fabrication

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Herstellung von großflächigen vertikale 2D Crystal Hetero-Strukturen durch Sulfurization Übergangsmetall Filme für Gerät Herstellung

9,029 Views

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08:50 min

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November 28, 2017

DOI:

10.3791/56494-v

DOI:

10.3791/56494-v

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08:50 min

November 28, 2017

•

1 Views

Chong-Rong Wu², Tung-Wei Chu³, Kuan-Chao Chen², Shih-Yen Lin²

¹Graduate Institute of Electronics Engineering,National Taiwan University, ²Research Center for Applied Sciences,Academia Sinica, ³Graduate Institute of Photonics and Optoelectronics,National Taiwan University

Tags

2D Crystal Heterostructures Vertical 2D Materials Sulfurization Transition Metal Films Device Fabrication RF Sputtering Sapphire Substrate Molybdenum Target Sulfur Powder Tube Furnace Argon Gas Molybdenum Disulfide Tungsten Target

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