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Aerosol-assisted Chemical Vapor Deposition of Metal Oxide Structures: Zinc Oxide Rods
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Chimie
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Aerosol-assisted Chemical Vapor Deposition of Metal Oxide Structures: Zinc Oxide Rods

Aerosol-assisted Chemical Vapor Deposition of Metal Oxide Structures: Zinc Oxide Rods

12,821 Views

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06:39 min

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September 14, 2017

DOI:

10.3791/56127-v

DOI:
10.3791/56127-v

•

06:39 min
September 14, 2017

•

3 Views
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1Instituto de Microelectrónica de Barcelona (IMB-CNM, CSIC), 2SIX Research Centre,Brno University of Technology, 3Institute of Physics of Material,Academy of Science of Czech Republic, 4Institute of Physical Engineering and Central European Institute of Technology,Brno University of Technology

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Columnar zinc oxide structures in the form of rods are synthesized via aerosol-assisted chemical vapor deposition without the use of pre-deposited catalyst-seed particles. This method is scalable and compatible with various substrates based on either silicon, quartz or polymers.

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Cite this Article

Vallejos, S., Pizúrová, N., Čechal, J., Gràcia, I., Cané, C. Aerosol-assisted Chemical Vapor Deposition of Metal Oxide Structures: Zinc Oxide Rods. J. Vis. Exp. (127), e56127, doi:10.3791/56127 (2017).

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