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制造和Acoustofluidic设备的运营支撑体声波驻波的聚焦鞘颗粒
Journal JoVE
Ingénierie
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Journal JoVE Ingénierie
Fabrication and Operation of Acoustofluidic Devices Supporting Bulk Acoustic Standing Waves for Sheathless Focusing of Particles
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制造和Acoustofluidic设备的运营支撑体声波驻波的聚焦鞘颗粒

DOI:
10.3791/53861-v

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10:14 min

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March 06, 2016

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, , , ,
1NSF Research Triangle Materials Research Science and Engineering Center,Duke University, 2Department of Biomedical Engineering,Duke University, 3Department of Mechanical Engineering and Materials Science,Duke University

Chapitres

  • 00:05Titre
  • 00:57Photolithography
  • 02:13Deep Reactive Ion Etching
  • 02:55Piranha Cleaning
  • 03:46Anodic Bonding
  • 05:41Finalizing the Acoustofluidic Device
  • 06:44Operating the Acoustofluidic Device
  • 08:01Results: Acoustofluidic Devices Support Bulk Acoustic Standing Waves
  • 09:03Conclusion

Summary

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Traduction automatique

Acoustofluidic设备使用微流体通道内的超声波处理，集中隔离悬浮微纳米级的实体。这个协议描述了这样支撑体声波驻波集中在中央流线型颗粒无护套的流体的辅助设备的制造和操作。

Tags

Acoustofluidic DevicesBulk Acoustic Standing WavesSheathless Particle FocusingMicrofabricationPhotolithographyDeep Reactive Ion EtchingSilicon Wafer Processing

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