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Fabrication of Silica Ultra High Quality Factor Microresonators
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Fabrication of Silica Ultra High Quality Factor Microresonators

Fabrication of Silica Ultra High Quality Factor Microresonators

15,904 Views

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07:51 min

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July 02, 2012

DOI:

10.3791/4164-v

DOI:
10.3791/4164-v

•

07:51 min
July 02, 2012

•

3 Views
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1Department of Chemical Engineering and Materials Science,University of Southern California, 2Department of Electrical Engineering-Electrophysics,University of Southern California

Tags

FabricationSilicaUltra High Quality FactorMicroresonatorsWhispering Gallery Resonant CavitiesPhoton Storage LifetimeQuality Factor (Q)Material LossesSilica MicrocavitiesPhoton LifetimesUltra-low-threshold MicrolasersThin FilmsCavity Quantum Electrodynamics StudiesMicrosphereMicrotoroidCarbon Dioxide Laser Reflow StepOptical FiberSilicon WaferLithographyEtching Steps

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Cite this Article

Maker, A. J., Armani, A. M. Fabrication of Silica Ultra High Quality Factor Microresonators. J. Vis. Exp. (65), e4164, doi:10.3791/4164 (2012).

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