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使用2-D棋盘相位光栅X射线束相干测量沿多个方向
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Measurement of X-ray Beam Coherence along Multiple Directions Using 2-D Checkerboard Phase Grating
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使用2-D棋盘相位光栅X射线束相干测量沿多个方向

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10:39 min

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October 11, 2016

DOI:

10.3791/53025-v

DOI:
10.3791/53025-v

•

10:39 min
October 11, 2016

•

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1X-ray Science Division, Advanced Photon Source,Argonne National Laboratory, 2Division of Science,Diamond Light Source Ltd.

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X-ray Beam Coherence2-D Checkerboard Phase GratingSynchrotron BeamlineGrading InterferometryTransverse Coherence2D GradientsElectroplating MoldSilicon WaferSilicon NitrideChromiumGoldPMMA ResistElectron Beam LithographyIsopropyl AlcoholDeveloper

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Marathe, S., Shi, X., Wojcik, M. J., Macrander, A. T., Assoufid, L. Measurement of X-ray Beam Coherence along Multiple Directions Using 2-D Checkerboard Phase Grating. J. Vis. Exp. (116), e53025, doi:10.3791/53025 (2016).

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