The fabrication process and experimental characterization techniques relevant to single-electron pumps based on silicon metal-oxide-semiconductor quantum dots are discussed.
Rossi, A., Tanttu, T., Hudson, F. E., Sun, Y., Möttönen, M., Dzurak, A. S. Silicon Metal-oxide-semiconductor Quantum Dots for Single-electron Pumping. J. Vis. Exp. (100), e52852, doi:10.3791/52852 (2015).