/

/

/

Radio Frequency Magnetron Sputtering of Bi₂Te₃ and Sb₂Te₃ Thermoelectric Thin Films on Glass Substrates

JoVE Revista
Ingeniería

Se requiere una suscripción a JoVE para ver este contenido. Inicie sesión o comience su prueba gratuita.

JoVE Revista Ingeniería

Radio Frequency Magnetron Sputtering of Bi₂Te₃ and Sb₂Te₃ Thermoelectric Thin Films on Glass Substrates

Please note that all translations are automatically generated. Click here for the English version.

Radio Frequency Magnetron Sputtering of Bi₂Te₃ and Sb₂Te₃ Thermoelectric Thin Films on Glass Substrates

DOI:

10.3791/201298-v

•

03:39 min

•

May 17, 2024

•

Nurfarhana Ahmad Musri, Yoganash Putthisigamany, Puvaneswaran Chelvanathan, Norasikin Ahmad Ludin, Nadhrah Md Yatim, Ubaidah Syafiq

¹Solar Energy Research Institute (SERI),Universiti Kebangsaan Malaysia, ²Faculty of Science and Technology,Universiti Sains Islam Malaysia

Tags

Radio Frequency Magnetron Sputtering Bi2Te3 Sb2Te3 Thermoelectric Thin Films Glass Substrates Aluminum Shield Magnetron Holder Vacuum Chamber Pressure Gauge Cooler System Argon Gas Flow Rotation Speed Automatic Matching Network Controller Radio Frequency Power Supply Plasma

Embed

Añadir a la lista de reproducción

Usage Statistics

Videos relacionados

ייצור יריעות דקות תרמואלקטריות Bi₂Te₃ ו- Sb₂Te₃ באמצעות טכניקת התזה של מגנטרון בתדר רדיו

Radio Frequency Magnetron Sputtering of Bi₂Te₃ and Sb₂Te₃ Thermoelectric Thin Films on Glass Substrates

Read Article