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Fabrication of Surface Acoustic Wave Devices on Lithium Niobate
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Fabrication of Surface Acoustic Wave Devices on Lithium Niobate

Fabrication of Surface Acoustic Wave Devices on Lithium Niobate

DOI:
10.3791/61013-v

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07:55 min

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June 18, 2020

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, ,
1Medically Advanced Devices Laboratory, Center for Medical Devices and Instrumentation, Department of Mechanical and Aerospace Engineering, Jacobs School of Engineering and Department of Surgery, School of Medicine,University of California San Diego

Kapitel

  • 00:04Introduction
  • 00:28SAW Device Fabrication Via Lift-Off Method
  • 03:21SAW Device Fabrication Via Wet Etching Method
  • 05:59Results: SAW Devices Generate Surface Acoustic Waves
  • 07:18Conclusion

Summary

Automatische Übersetzung

Automatische Übersetzung

Two fabrication techniques, lift-off and wet etching, are described in producing interdigital electrode transducers upon a piezoelectric substrate, lithium niobate, widely used to generate surface acoustic waves now finding broad utility in micro to nanoscale fluidics. The as-produced electrodes are shown to efficiently induce megahertz order Rayleigh surface acoustic waves. 

Tags

Surface Acoustic WaveLithium NiobateFabricationPhotoresistSpin CoatingUV ExposureRD6 DeveloperSputteringChromiumAluminum

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