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Beredning av stora ytor vertikala 2D Crystal Hetero-strukturer genom Sulfurization övergången metall filmer för enheten Fabrication
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JoVE Journal Ingenieurwesen
Preparation of Large-area Vertical 2D Crystal Hetero-structures Through the Sulfurization of Transition Metal Films for Device Fabrication
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Beredning av stora ytor vertikala 2D Crystal Hetero-strukturer genom Sulfurization övergången metall filmer för enheten Fabrication

9,029 Views

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08:50 min

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November 28, 2017

DOI:

10.3791/56494-v

DOI:
10.3791/56494-v

•

08:50 min
November 28, 2017

•

1 Views
, , ,
1Graduate Institute of Electronics Engineering,National Taiwan University, 2Research Center for Applied Sciences,Academia Sinica, 3Graduate Institute of Photonics and Optoelectronics,National Taiwan University

Tags

2D Crystal HeterostructuresVertical 2D MaterialsSulfurizationTransition Metal FilmsDevice FabricationRF SputteringSapphire SubstrateMolybdenum TargetSulfur PowderTube FurnaceArgon GasMolybdenum DisulfideTungsten Target

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Wu, C., Chu, T., Chen, K., Lin, S. Preparation of Large-area Vertical 2D Crystal Hetero-structures Through the Sulfurization of Transition Metal Films for Device Fabrication. J. Vis. Exp. (129), e56494, doi:10.3791/56494 (2017).

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