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Voorbereiding van groot-gebied verticale 2D Crystal Hetero-structuren door de Sulfurization van overgangsmetalen Films voor de fabricatie van apparaat
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JoVE Journal Ingenieurwesen
Preparation of Large-area Vertical 2D Crystal Hetero-structures Through the Sulfurization of Transition Metal Films for Device Fabrication
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Voorbereiding van groot-gebied verticale 2D Crystal Hetero-structuren door de Sulfurization van overgangsmetalen Films voor de fabricatie van apparaat

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08:50 min

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November 28, 2017

DOI:

10.3791/56494-v

DOI:
10.3791/56494-v

•

08:50 min
November 28, 2017

•

1 Views
, , ,
1Graduate Institute of Electronics Engineering,National Taiwan University, 2Research Center for Applied Sciences,Academia Sinica, 3Graduate Institute of Photonics and Optoelectronics,National Taiwan University

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2D Crystal HeterostructuresVertical 2D MaterialsSulfurizationTransition Metal FilmsDevice FabricationRF SputteringSapphire SubstrateMolybdenum TargetSulfur PowderTube FurnaceArgon GasMolybdenum DisulfideTungsten Target

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Wu, C., Chu, T., Chen, K., Lin, S. Preparation of Large-area Vertical 2D Crystal Hetero-structures Through the Sulfurization of Transition Metal Films for Device Fabrication. J. Vis. Exp. (129), e56494, doi:10.3791/56494 (2017).

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