/

/

3D碳微机电系统（C-MEMS）的制造

JoVE Journal
Ingenieurwesen

Zum Anzeigen dieser Inhalte ist ein JoVE-Abonnement erforderlich. Melden Sie sich an oder starten Sie Ihre kostenlose Testversion.

JoVE Journal Ingenieurwesen

Fabrication of 3D Carbon Microelectromechanical Systems (C-MEMS)

Please note that all translations are automatically generated. Click here for the English version.

3D碳微机电系统（C-MEMS）的制造

11,956 Views

•

08:01 min

•

June 17, 2017

DOI:

10.3791/55649-v

DOI:

10.3791/55649-v

•

08:01 min

June 17, 2017

•

2 Views

Bidhan Pramanick¹, Sergio O. Martinez-Chapa¹, Marc Madou^1,2, Hyundoo Hwang^1,3

¹School of Engineering and Sciences,Tecnologico de Monterrey, ²Department of Mechanical and Aerospace Engineering,University of California, ³BBB Inc

Summary

基于天然产物，人发的热解制造长而中空的玻璃碳微纤维。碳微机电和碳纳米机电系统或C-MEMS和C-NEMS的两个制造步骤是：（i）富碳聚合物前体的光刻和（ii）图案化聚合物前体的热解。

Explore More Videos

3D Carbon Microelectromechanical Systems (C-MEMS)Carbon Microelectromechanical Systems Polymer Precursor Carbon Fabrication Carbon Structures Isometric Shrinkage Carbon Allotropes Graphitic Diamond-like Glassy Carbon Polymer Structure Fabrication Spin Coating Photoresist Photolithography

Read Article