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Electron Canalización de imágenes de contraste para Rapid III-V heteroepitaxial Caracterización
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Electron Canalización de imágenes de contraste para Rapid III-V heteroepitaxial Caracterización
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July 17, 2015
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The use of electron channeling contrast imaging in a scanning electron microscope to characterize defects in III-V/Si heteroexpitaxial thin films is described. This method yields similar results to plan-view transmission electron microscopy, but in significantly less time due to lack of required sample preparation.
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Deitz, J. I., Carnevale, S. D., Ringel, S. A., McComb, D. W., Grassman, T. J. Electron Channeling Contrast Imaging for Rapid III-V Heteroepitaxial Characterization. J. Vis. Exp. (101), e52745, doi:10.3791/52745 (2015).
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