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Epitaxie Perowskit Strontiumtitanat auf Germanium über Atomic Layer Deposition
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Epitaxial Growth of Perovskite Strontium Titanate on Germanium via Atomic Layer Deposition
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Epitaxie Perowskit Strontiumtitanat auf Germanium über Atomic Layer Deposition

12,088 Views

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09:45 min

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July 26, 2016

DOI:

10.3791/54268-v

DOI:
10.3791/54268-v

•

09:45 min
July 26, 2016

•

1 Views
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1McKetta Department of Chemical Engineering,The University of Texas at Austin

Tags

Epitaxial GrowthPerovskiteStrontium TitanateGermaniumAtomic Layer DepositionMicroelectronicsDielectricCrystalline OxidesInterface StatesManufacturingPrecursorsMolecular Beam EpitaxySubstrate CleaningUV Ozone CleaningVacuum System

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Lin, E. L., Edmondson, B. I., Hu, S., Ekerdt, J. G. Epitaxial Growth of Perovskite Strontium Titanate on Germanium via Atomic Layer Deposition. J. Vis. Exp. (113), e54268, doi:10.3791/54268 (2016).

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