需要订阅 JoVE 才能查看此. 登录或开始免费试用。
Epitaxial Growth of Perovskite Strontium Titanate on Germanium via Atomic Layer Deposition
12,119 Views
•
09:45 min
•
July 26, 2016
DOI:
Summary
Automatically generated
This work details the procedures for the growth and characterization of crystalline SrTiO3 directly on germanium substrates by atomic layer deposition. The procedure illustrates the ability of an all-chemical growth method to integrate oxides monolithically onto semiconductors for metal-oxide semiconductor devices.
Read Article
Cite this Article
Lin, E. L., Edmondson, B. I., Hu, S., Ekerdt, J. G. Epitaxial Growth of Perovskite Strontium Titanate on Germanium via Atomic Layer Deposition. J. Vis. Exp. (113), e54268, doi:10.3791/54268 (2016).
Copy