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화학 용액 증착에 의해 실리콘에 거대 다공성 에피 택셜 석영 필름의 제조
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07:37 min
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December 21, 2015
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A protocol is presented for the preparation of piezoelectric macroporous epitaxial films of quartz on silicon by solution chemistry using dip-coating and thermal treatments in air.
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Carretero-Genevrier, A., Gich, M. Preparation of Macroporous Epitaxial Quartz Films on Silicon by Chemical Solution Deposition. J. Vis. Exp. (106), e53543, doi:10.3791/53543 (2015).
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