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Journal
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Engineering
/
Deposition of Bi
2
Te
3
and Sb
2
Te
3
Thin Films on Glass Substrates via RF Sputtering
/
使用射频磁控溅射技术制备Bi
2
Te
3
和Sb
2
Te
3
热电薄膜
JoVE Journal
Engineering
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JoVE Journal
Engineering
Fabrication of Bi
2
Te
3
and Sb
2
Te
3
Thermoelectric Thin Films using Radio Frequency Magnetron Sputtering Technique
Please note that all translations are automatically generated.
Click here for the English version.
使用射频磁控溅射技术制备Bi
2
Te
3
和Sb
2
Te
3
热电薄膜
Deposition of Bi
2
Te
3
and Sb
2
Te
3
Thin Films on Glass Substrates via RF Sputtering
DOI:
10.3791/66248-v
•
00:45 min
•
May 17, 2024
•
Nurfarhana Ahmad Musri
,
Yoganash Putthisigamany
,
Puvaneswaran Chelvanathan
,
Norasikin Ahmad Ludin
,
Nadhrah Md Yatim
,
Ubaidah Syafiq
1
Solar Energy Research Institute (SERI)
,
Universiti Kebangsaan Malaysia
,
2
Faculty of Science and Technology
,
Universiti Sains Islam Malaysia
Tags
Bi2Te3
Sb2Te3
Thermoelectric Thin Films
Radio Frequency Magnetron Sputtering
Thin Film Deposition
Waste Heat Recovery
Thermoelectric Generators
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使用射频磁控溅射技术制备Bi
2
Te
3
和Sb
2
Te
3
热电薄膜
Radio Frequency Magnetron Sputtering of Bi
2
Te
3
and Sb
2
Te
3
Thermoelectric Thin Films on Glass Substrates
Read Article
