We present a protocol for fabricating 1-D photonic crystal cavities on subwavelength diameter silica fibers (optical nanofibers) using femtosecond laser-induced ablation.
We present a protocol for fabricating 1-D Photonic Crystal (PhC) cavities on subwavelength-diameter tapered optical fibers, optical nanofibers, using femtosecond laser-induced ablation. We show that thousands of periodic nano-craters are fabricated on an optical nanofiber by irradiating with just a single femtosecond laser pulse. For a typical sample, periodic nano-craters with a period of 350 nm and with diameter gradually varying from 50 – 250 nm over a length of 1 mm are fabricated on a nanofiber with diameter around 450 – 550 nm. A key aspect of such a nanofabrication is that the nanofiber itself acts as a cylindrical lens and focuses the femtosecond laser beam on its shadow surface. Moreover, the single-shot fabrication makes it immune to mechanical instabilities and other fabrication imperfections. Such periodic nano-craters on nanofiber, act as a 1-D PhC and enable strong and broadband reflection while maintaining the high transmission out of the stopband. We also present a method to control the profile of the nano-crater array to fabricate apodized and defect-induced PhC cavities on the nanofiber. The strong confinement of the field, both transverse and longitudinal, in the nanofiber-based PhC cavities and the efficient integration to the fiber networks, may open new possibilities for nanophotonic applications and quantum information science.
Strong confinement of light in nanophotonic devices has opened new frontiers in optical science. Modern nanofabrication technologies have enabled fabrication of 1-D and 2-D Photonic Crystal (PhC) cavities for new prospects in lasing1, sensing2 and optical switching applications3. Moreover, strong light-matter interaction in these PhC cavities has opened new avenues for quantum information science4. Apart from PhC cavities, plasmonic nanocavities have also shown promising prospects5,6,7. However, interfacing such cavities to fiber-based communication network remains a challenge.
In recent years, tapered single mode optical fiber with subwavelength diameter, known as optical nanofiber, has emerged as a promising nanophotonic device. Due to the strong transverse confinement of the nanofiber guided field and the ability to interact with the surrounding medium, the nanofiber is widely adapted and investigated for various nanophotonic applications8. Apart from that, it is also strongly investigated and implemented for quantum manipulation of light and matter9. Efficient coupling of emission from quantum emitters like, single/few laser-cooled atoms and single quantum dots, into the nanofiber guided modes has been studied and demonstrated10,11,12,13,14,15. The light-matter interaction on nanofiber can be significantly improved by implementing PhC cavity structure on the nanofiber16,17.
The key advantage for such a system is the fiber-in-line technology which can be readily integrated to communication network. Light transmission of 99.95% through the tapered nanofiber has been demonstrated18. However, the nanofiber transmission is extremely susceptible to dust and contamination. Therefore, fabrication of PhC structure on nanofiber using conventional nanofabrication technique is not very fruitful. Although cavity fabrication on nanofiber using Focused Ion Beam (FIB) milling has been demonstrated19,20, the optical quality and reproducibility is not as high.
In this video protocol, we present a recently demonstrated21,22 technique to fabricate PhC cavities on nanofiber using femtosecond laser ablation. The fabrications are performed by creating a two-beam interference pattern of the femtosecond laser on the nanofiber and irradiating a single femtosecond laser pulse. The lensing effect of the nanofiber plays an important role in the feasibility of such techniques, creating ablation craters on the shadow surface of the nanofiber. For a typical sample, periodic nano-craters with a period of 350 nm and with diameter gradually varying from 50 – 250 nm over a length of 1 mm are fabricated on a nanofiber with diameter around 450 – 550 nm. Such periodic nano-craters on nanofiber, act as a 1-D PhC. We also present a method to control the profile of the nano-crater array to fabricate apodized and defect-induced PhC cavities on the nanofiber.
A key aspect of such nanofabrication is the all optical fabrication, so that high optical quality can be maintained. Moreover, the fabrication is done by the irradiation of just a single femtosecond laser pulse, making the technique immune to mechanical instabilities and other fabrication imperfections. Also this enables in-house production of PhC nanofiber cavity so that the probability of contamination can be minimized. This protocol is intended to help others implement and adapt this new type of nanofabrication technique.
Figure 1a shows the schematic diagram of the fabrication setup. The details of the fabrication setup and alignment procedures are discussed in21,22. A femtosecond laser with 400 nm center wavelength and 120 fs pulse width is incident on a phase mask. The phase mask splits the femtosecond laser beam in to 0 and ±1 orders. A beam block is used to block the 0-order beam. The folding mirrors symmetrically recombine the ±1-orders at the nanofiber position, to create an interference pattern. The pitch of the phase mask is 700 nm, so the interference pattern has a pitch (ΛG) of 350 nm. The cylindrical lens focuses the femtosecond laser beam along the nanofiber. The beam size across (Y-axis) and along (Z-axis) the nanofiber is 60 µm and 5.6 mm, respectively. The tapered fiber is mounted on a holder equipped with piezo actuator (PZT) for stretching the fiber. A top cover with glass plate is used to protect the nanofiber from dust. The holder with the tapered fiber is fixed on a fabrication bench equipped with translation (XYZ) and rotation (θ) stages. The θ-stage allows rotation of the nanofiber sample in the YZ-plane. The X-stage can also control the tilt angles along XY- and XZ-plane. A CCD camera is placed at a distance of 20 cm from the nanofiber and at an angle of 45° in the XY-plane to monitor the nanofiber position. All the experiments are performed inside a clean booth equipped with HEPA (High-efficiency particulate arresting) filters to achieve dust-free conditions. Dust-free condition is essential to maintain the transmission of the nanofiber.
Figure 1b shows the schematic of the optical measurements. During fabrication, the optical properties are briefly monitored by launching a broadband (wavelength range: 700 – 900 nm) fiber-coupled light source into the tapered fiber and measuring the spectrum of the transmitted and reflected light using high resolution spectrum analyzer. A tunable CW laser source is used to properly resolve the cavity modes and to measure the absolute cavity transmission.
We present the protocol for the fabrication and characterization. The protocol section is divided in three subsections, nanofiber preparation, femtosecond laser fabrication and characterization of the fabricated samples.
CAUTION: Wear safety glasses and strictly avoid direct exposure to UV lamp and all lasers including the femtosecond laser. Wear a clean room suit and gloves to avoid contamination. Dispose any fiber trash properly in the designated trash box.
1. Nanofiber Preparation
2. Femtosecond Laser Fabrication
3. Characterization of the Fabricated Samples
Figure 2 shows the SEM image of a typical segment of the fabricated nanofiber sample. It shows that periodic nano-craters are formed on the shadow side of the nanofiber, with a periodicity of 350 nm corresponding well to the interference pattern. The inset shows the enlarged view of the sample. The shape of the nano-craters is almost circular and the diameter of a typical nano-crater is around 210 nm.
Figure 3a shows the fabrication results for the apodized PhC cavity. The typical profile of the nano-crater array along with the corresponding nanofiber diameter for different fabrication angle (θ) and pulse energy are shown. The circles denote the nano-crater diameter and the squares are the corresponding nanofiber diameter. The lines are the Gaussian fits to the profiles. The data shown in black and green correspond to samples fabricated with θ = 0 deg, using pulse energy of 0.35 and 0.17 mJ, respectively. The data shown in red and blue correspond to samples fabricated with θ = 0.5 deg using pulse energy of 0.35 and 0.27 mJ, respectively. As one can see, the nano-craters are formed over a length of 2-3 mm along the nanofiber where the diameter of the nanofiber is uniform. An apodization in nano-crater diameter is observed corresponding to the Gaussian intensity distribution of the femtosecond laser beam. It is clearly seen that the diameter of the nano-craters is reduced for weaker pulse energy. Moreover, the width of the apodization profile of the nano-craters is reduced by increasing the angle of fabrication.
The fabrication result for the defect-induced PhC cavity is shown in Figure 3b. A double peak-like profile is observed. A gradual change in the diameter is observed at the outside edges of the peaks, whereas the diameter changed rapidly at the inside edge of the peaks. A defect region of 0.5 mm with no nano-craters is observed between two peaks. The length of the defect region corresponds well to the thickness of the copper wire inserted in to the femtosecond laser beam.
Figure 4 shows the transmission spectra for an apodized PhC cavity sample whose diameter profile is shown in blue in Figure 3a. Figures 4a and 4b show the typical transmission spectra for X- and Y-polarizations, respectively. The spectrum for the X-pol shows a stopband region from 793.7 – 798.8 nm, where the transmission drops to a few percent. The stopband for the Y-pol is red-shifted and broader compared to the X-pol. The sharp peaks observed in the red-side of the stopband are the cavity modes. The finesse and peak transmission of the typical cavity modes are listed in Table 1.
Figures 5a and 5b show the transmission spectra of the defect-induced PhC cavity for X- and Y-polarizations, respectively. As one can see, sharp cavity modes appear on either side of the stopband. However, the mode spacing in the blue-side is much larger than that in the red-side of the spectra. The finesse and peak transmission of the typical cavity modes are summarized in Table 1.
Figure 1: Schematic Diagram of the Experiment. (a) Schematic diagram of the fabrication setup. A two-beam interference pattern is created on the nanofiber using a phase mask as the beam splitter and two folding mirrors (see text for details). A cylindrical lens is used to line focus the femtosecond laser along the nanofiber. A zero-order block is used to avoid any residual zero order light in the interference region. A photodiode is connected to one end of the tapered fiber to observe the scattering of the femtosecond laser into the nanofiber guided modes. A CCD camera is used to monitor the nanofiber position. (b) Schematic diagram for the measurement of optical properties. The transmission and reflection spectra of the fabricated nanofiber samples are simultaneously measured by varying the polarization of the input light. PhC, PZT, NPBS and SA denote photonic crystal, piezo actuator, nonpolarizing beam splitter and spectrum analyzer, respectively. This figure has been modified from21. Please click here to view a larger version of this figure.
Figure 2: SEM Image of a Fabricated Sample. SEM image of a typical sample fabricated using single-shot irradiation. The inset shows the enlarged view. The periodic nano-crater structures are observed on the shadow side of the nanofiber. This figure has been modified from21. Please click here to view a larger version of this figure.
Figure 3: Diameter Profile of the Nano-crater Array on the Nanofiber along with the Brief Schematic of the Fabrication Method. (a) The diameter profile for the apodized PhC cavity. The circles denote the nano-crater diameter and the squares are the corresponding nanofiber diameter. The lines are the Gaussian fits to the profiles. The data shown in black and green correspond to samples fabricated with θ = 0 deg, using pulse energy of 0.35 and 0.17 mJ, respectively. The data shown in red and blue correspond to samples fabricated with θ = 0.5 deg, using pulse energy of 0.35 and 0.27 mJ, respectively. (b) The diameter profile for the defect-induced PhC cavity fabricated using a pulse energy of 0.4 mJ. The blue circles and the black squares show the nano-crater diameter and the nanofiber diameter, respectively. This figure is reused from22. Please click here to view a larger version of this figure.
Figure 4: Transmission Spectra of the Apodized PhC Cavity. Transmission spectrum of apodized PhC cavity for (a) X-pol and (b) Y-pol. The parts of the spectra, marked by blue boxes are enlarged and shown in the insets. This figure is reused from 22. Please click here to view a larger version of this figure.
Figure 5: Transmission Spectra of the Defect-induced PhC Cavity. Transmission spectrum of the defect-induced PhC cavity for (a) X-pol and (b) Y-pol. The parts of the spectra, marked by blue boxes are enlarged and shown in the insets. This figure is reused from22. Please click here to view a larger version of this figure.
Figure | Mode | F | T [%] | FSR [cm-1] | L [mm] |
4(a) | (1,2,3) | (71, 39, 16) | (33, 87, 93) | 7.94 | 0.54 |
4(b) | (1,2,3) | (500, 27, 11) | (21, 30, 73) | 3.94 | 1.09 |
5(a) | (1,2,3,4) | (198, 115, 50, 21) | (25, 39, 64, 83) | 3.34 | 1.28 |
(A,B,C,D) | (86, 63, 48, 20) | (26, 56, 73, 90) | 1.58 | 2.71 | |
5(b) | (1,2,3,4) | (178, 104, 43, 22) | (17, 39, 65, 93) | 3.15 | 1.36 |
(A,B,C,D) | (48, 44, 24, 22) | (20, 38, 56, 87) | 1.25 | 3.43 |
Table 1: Optical Characteristics of the Typical Cavity Modes. This table summarizes the optical characteristics of typical cavity modes marked in Figures 4a, 4b, 5a and 5b. F, T, FSR, and L denote finesse, peak transmission, mode spacing, and estimated cavity length, respectively. This table is reused from22.
Supplemental file 1: Photograph of the ONME Setup. Please click here to download this file.
Supplemental file 2: Photographs of the Femtosecond Laser Fabrication Setup. Please click here to download this file.
The lensing effect of the nanofiber plays an important role in the fabrication technique, thereby creating nano-craters on the shadow surface of the nanofiber (shown in Figure 2). The lensing effect of the nanofiber also makes the fabrication process robust to any mechanical instabilities in the transverse direction (Y-axis). Moreover, due to single-shot irradiation, the instabilities along the other axes do not affect the fabrication as the irradiation time is only 120 fs (i.e. pulse width). As a result, periodic nanostructures with well-defined periodicity are fabricated over several thousands of periods, without taking any special care to suppress mechanical vibrations.
Many nanofabrication techniques like FIB milling, electron beam lithography and even femtosecond laser ablation, implement point-by-point fabrication. The point-by-point fabrication is well suited for rigid samples, where the mechanical stability can be guaranteed. In case of optical nanofibers, if the tapered fiber is kept hanging without touching any rigid substrate then mechanical instabilities affects the fabrication process. On the other hand, if the nanofiber is placed on a rigid substrate then contamination from the substrate itself or due to the etching of the substrate can degrade the optical quality. In particular, with respect to the FIB milling technique, additional drawbacks are mechanical instabilities due to charging up effects of the nanofiber and material modification due to contamination from the ion beam itself. Therefore, the protocol presented here for a single-shot optical fabrication on nanofiber is preferable to the point-by-point fabrication. However, point-by-point fabrication may be preferred for some applications where fabricating arbitrary pattern on the nanofiber is essential.
One crucial step in the protocol is the alignment of the fabrication setup. Since the fabrication is performed by femtosecond pulse with a pulse width of 120 fs, the optical path length difference between the ±1-orders should be minimized to ensure spatial overlap23. The path length difference should be less than 36 μm to ensure high visibility of the interference fringe. Hence, the position and the tilt angles of the folding mirrors should be precisely controlled. Although the femtosecond laser beam size along the nanofiber is 5.6 mm the interference region is less than 1 mm along the X-axis limited by the spatial overlap of the pulses. It should also be taken care that the femtosecond laser beam is incident exactly perpendicular to the phase mask and the fabrication bench should be parallel to the phase mask. Even a tilt of 10 mrad can induce enough path length difference to wash out the interference fringe. Finally, the axis of the cylindrical lens should be precisely perpendicular to the lines on the phase mask. Otherwise it will induce a rotation angle between the line focused ±1-orders reducing the overlap between them.
Another critical requirement for successful fabrication is the production of high quality nanofiber. To get high finesse cavity modes, the original nanofiber transmission should be > 95% and should be free from dust or any contamination. Any contamination on nanofiber will induce irregular intensity pattern resulting in non-reproducible fabrication and may even break the nanofiber. The quality of the nanofiber is judged from the high transmission and scattering pattern of the guided modes observed on the CCD camera.
The transmission spectra, shown in Figures 4 and 5, show stopband regions where more than 98% of the input light is reflected and transmission drops to a few percent. The transmission away from the stopband is around 100% ensuring that the fabrication does not induce significant loss and maintains the optical quality of the nanofiber. Moreover, the observed high finesse cavity modes (listed in Table 1) inside the stopband further ensures the quality of the fabrication. The stopband is well understood from the Bragg reflection from the periodic nano-craters on the nanofiber. The Bragg resonance (λR = 2neffΛG) depends on the effective index (neff) of the guided mode and the pitch (ΛG) of the interference fringe. In the data presented in this protocol, the stopband is observed around a wavelength of 800 nm. The stopband and the cavity modes can be tuned over 10-15 nm by stretching the tapered fiber. However, to further change the resonance wavelength one must change the nanofiber diameter to realize a different neff or change the phase mask to realize a different ΛG.
From the cavity modes listed in Table 1, finesse values ranging from 30 – 500 can be realized. Due to the strong transverse confinement of the nanofiber guided modes, high cooperativity / Purcell factors are expected for such finesse values16. The broadband tunability along with strong confinement of field in such a fiber-based PhC cavity offers high demand for various applications ranging from nanophotonics to quantum information science.
In conclusion, we have presented a protocol for fabricating 1D PhC cavities on subwavelength diameter silica fibers using femtosecond laser induced ablation. Such fabrication technique may be implemented to make various nanophotonic devices from micro/nanofibers and may be adapted to other nanofabrication processes.
The authors have nothing to disclose.
This work was supported by the Japan Science and Technology Agency (JST) through the Strategic Innovation Program. KPN acknowledges support from a grant-in-aid for scientific research (Grant no. 15H05462) from the Japan Society for the Promotion of Science (JSPS).
Femtosecond Laser | Coherent Inc. | Libra HE | |
Phase Mask | Ibsen Photonics | Custom Made | |
Optial Nanofiber Manufacturing Equipment | Ishihara Sangyo | ONME | |
ADC Card | PicoTech | ADC-24 | |
Single mode fiber | Fujikura | FutureGuide-SM | |
Broadband source | NKT Photonics | SuperK EXTREME | |
CW Tunable Laser | Coherent Inc. | MBR-110 | |
Spectrum analyser (Transmission spectrum) | Thermo Fisher Scientific | Nicolet 8700 | |
Spectrum analyser (Reflection spectrum) | Ocean Optics | QE65000 | |
CCD Camera | Thorlabs | DCC1545M | |
Power Meter | Thorlabs | D3MM | |
Pt-Coater | Vacuum Device Inc. | MSP-1S | |
Scanning Electron Microscope | Keyence | VE-9800 | |
UV Curable Epoxy | NTT-AT | AT8105 | |
Photodiode | ThorLabs | PDA 36A-EC | |
Clean room wipe | TExWipe | TX-404 | |
Fiber coating stripper | NTT-AT | Fiber nippers 250 μm | |
Cover glass | Matsunami Glass IND,LTD | NEO micro cover glass 0.12-0.17 mm | |
PZT | NOLIAC | NAC 2011-H20 | |
Cylindrical lens stage | NewPort | M-481-A | |
Y,Z stages | Chuo Precision Industrial Co., LTD. | LD-149-C7 | |
Rotation stage | SIGMA KOKI | KSPB-1026MH | |
Z-stage(1), Z-stage(2) | NewPort | M-460P | |
Fiber coating stripper | NTT-AT | Fiber nippers 250 μm |