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Deposition of Bi₂Te₃ and Sb₂Te₃ Thin Films on Glass Substrates via RF Sputtering

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高周波マグネトロンスパッタリング法を用いたBi2Te3および_Sb2Te3熱電薄膜の作製

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Fabrication of Bi₂Te₃ and Sb₂Te₃ Thermoelectric Thin Films using Radio Frequency Magnetron Sputtering Technique

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高周波マグネトロンスパッタリング法を用いたBi2Te3および_Sb2Te3熱電薄膜の作製

Deposition of Bi₂Te₃ and Sb₂Te₃ Thin Films on Glass Substrates via RF Sputtering

DOI:

10.3791/66248-v

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00:45 min

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May 17, 2024

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Nurfarhana Ahmad Musri, Yoganash Putthisigamany, Puvaneswaran Chelvanathan, Norasikin Ahmad Ludin, Nadhrah Md Yatim, Ubaidah Syafiq

¹Solar Energy Research Institute (SERI),Universiti Kebangsaan Malaysia, ²Faculty of Science and Technology,Universiti Sains Islam Malaysia

Tags

Bi2Te3 Sb2Te3 Thermoelectric Thin Films Radio Frequency Magnetron Sputtering Thin Film Deposition Waste Heat Recovery Thermoelectric Generators N-type P-type

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高周波マグネトロンスパッタリング法を用いたBi2Te3および_Sb2Te3熱電薄膜の作製

Radio Frequency Magnetron Sputtering of Bi₂Te₃ and Sb₂Te₃ Thermoelectric Thin Films on Glass Substrates

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