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실리콘에 에피 택시 나노 구조α 석영 필름: 재료에서 새로운 장치에
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October 06, 2020
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EpitaxialNanostructuredAlpha-quartzSiliconQuartz-based SensorsMiniaturizationMonolithic IntegrationChemical IntegrationEpitaxial RequirementsMicrocantileversActive Microelectromechanical SystemLead-free Piezoelectric Oxide MaterialsMass SensitivityPDMSSOI SubstrateDip CoatingGel FilmMicro/nanostructure
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Jolly, C., Sanchez-Fuentes, D., Garcia-Bermejo, R., Cakiroglu, D., Carretero-Genevrier, A. Epitaxial Nanostructured α-Quartz Films on Silicon: From the Material to New Devices. J. Vis. Exp. (164), e61766, doi:10.3791/61766 (2020).
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