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用于密集激光辐照实验的微制造目标的自动交付
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Automated Delivery of Microfabricated Targets for Intense Laser Irradiation Experiments
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用于密集激光辐照实验的微制造目标的自动交付

DOI:
10.3791/61056-v

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06:40 min

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January 28, 2021

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, , , , , ,
1The School of Physics and Astronomy,Tel Aviv University, 2Tel Aviv University Center for Light-Matter Interaction

Capítulos

  • 00:05Introduction
  • 00:46Target Fabrication
  • 03:32Target Alignment
  • 04:32Irradiation Sequence and Automated Target Positioning
  • 05:15Resultados
  • 06:13Conclusion

Summary

Tadução automática

Tadução automática

提出了一种用高强度激光脉冲对薄金箔进行自动照射的协议。该协议包括微加工目标制造过程的分步描述，以及如何以 0.2 Hz 速率将目标带到激光聚焦的详细指南。

Tags

Microfabricated TargetsIntense Laser IrradiationAutomated Target DeliveryWafer FabricationSilicon NitridePotassium HydroxideReactive Ion EtchingPhysical Vapor DepositionGold Sputtering

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