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Herstellung und Prüfung von photonischen Thermometer

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Fabrication and Testing of Photonic Thermometers

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Herstellung und Prüfung von photonischen Thermometer

5,573 Views

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08:44 min

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October 24, 2018

DOI:

10.3791/55807-v

DOI:

10.3791/55807-v

•

08:44 min

October 24, 2018

•

6 Views

Nikolai N. Klimov², Zeeshan Ahmed

¹Joint Quantum Institute,University of Maryland, ²Physical Measurement Laboratory,National Institute of Standards and Technology

Tags

Photonic Thermometers Photonic Thermometry Frequency-based Measurements Temperature Metrology Optomechanical Temperature Standards SOI Wafer Fabrication E-beam Lithography ICP RIE Etching Photonic Chip Dicing V-groove Array Alignment

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