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वास्तविक समय डीसी गतिशील Biasing विधि गंभीर रूप Underdamped Fringing क्षेत्र इलेक्ट्रोस्टैटिक MEMS actuators में समय सुधार स्विचिंग के लिए

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Real-Time DC-dynamic Biasing Method for Switching Time Improvement in Severely Underdamped Fringing-field Electrostatic MEMS Actuators

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वास्तविक समय डीसी गतिशील Biasing विधि गंभीर रूप Underdamped Fringing क्षेत्र इलेक्ट्रोस्टैटिक MEMS actuators में समय सुधार स्विचिंग के लिए

10,150 Views

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11:44 min

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August 15, 2014

DOI:

10.3791/51251-v

DOI:

10.3791/51251-v

•

11:44 min

August 15, 2014

•

1 Views

Joshua Small, Adam Fruehling, Anurag Garg, Xiaoguang Liu, Dimitrios Peroulis

¹Department of Electrical and Computer Engineering,University of California, Davis, ²Digital Light Projection (DLP) Technology Development,Texas Instruments, ³Birck Nanotechnology Center and the Department of Electrical and Computer Engineering,Purdue University

Tags

Real-time DC-dynamic Biasing Switching Time Improvement Underdamped Fringing-field Electrostatic MEMS Actuators Fast Switching Operation Settling Time Transient Applied Bias Waveforms Mechanical Quality Factor Substrate Removal Reliability Stiction Charge Pump CMOS Processing Experimental Validation Switching Time Improvement

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