In Depth Analyses of LEDs by a Combination of X-ray Computed Tomography (CT) and Light Microscopy (LM) Correlated with Scanning Electron Microscopy (SEM)

J&#246;rg Meyer; Christian Thomas; Frank Tappe; Tekie Ogbazghi

doi:10.3791/53870

/

In Depth Analyses of LEDs by a Combination of X-ray Computed Tomography (CT) and Light Microscopy (LM) Correlated with Scanning Electron Microscopy (SEM)

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工学

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JoVE Journal 工学

In Depth Analyses of LEDs by a Combination of X-ray Computed Tomography (CT) and Light Microscopy (LM) Correlated with Scanning Electron Microscopy (SEM)

9,073 Views

•

10:42 min

•

June 16, 2016

DOI:

10.3791/53870-v

DOI:

10.3791/53870-v

•

10:42 min

June 16, 2016

•

35 Views

Jörg Meyer¹, Christian Thomas¹, Frank Tappe¹, Tekie Ogbazghi¹

¹Department Lippstadt,Hamm-Lippstadt University of Applied Sciences

概要

A workflow for comprehensive micro-characterization of active optical devices is outlined. It contains structural as well as functional investigations by means of CT, LM and SEM. The method is demonstrated for a white LED which can be still be operated during characterization.

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X-ray Computed Tomography (CT)Light Microscopy (LM)Scanning Electron Microscopy (SEM)Micro-characterization Failure Analysis Reverse Engineering Microelectronic Devices Optical Properties Microstructure Composite Materials Auto-scan Optimizer Detector Shift Sample Preparation Epoxy Resin Silver Wire

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In Depth Analyses of LEDs by a Combination of X-ray Computed Tomography (CT) and Light Microscopy (LM) Correlated with Scanning Electron Microscopy (SEM)

概要

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