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紫外发光二极管纳米图案蓝宝石基板的AlN薄膜的石墨烯辅助准范德瓦尔斯皮Taxy
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June 25, 2020
DOI:
1State Key Laboratory of Solid-State Lighting, Institute of Semiconductors,Chinese Academy of Sciences, 2Center of Materials Science and Optoelectronics Engineering,University of Chinese Academy of Science, 3Center for Nanochemistry (CNC), Beijing National Laboratory for Molecular Science, College of Chemistry and Molecular Engineering,Peking University, 4State Key Laboratory of Superlattices and Microstructures, Institute of Semiconductors,Chinese Academy of Sciences, 5Electron Microscopy Laboratory, School of Physics,Peking University
Summary
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提出了一种在纳米图案蓝宝石基材上生产高质量AlN薄膜的石墨烯辅助生长方案。
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Cite this Article
Zhang, X., Chen, Z., Chang, H., Yan, J., Yang, S., Wang, J., Gao, P., Wei, T. Graphene-Assisted Quasi-van der Waals Epitaxy of AlN Film on Nano-Patterned Sapphire Substrate for Ultraviolet Light Emitting Diodes. J. Vis. Exp. (160), e60167, doi:10.3791/60167 (2020).
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