Journal
/
Ingeniería
/
Epitaxial Nanostructured α-Quartz Films on Silicon: From the Material to New Devices
JoVE Revista
Ingeniería
Se requiere una suscripción a JoVE para ver este contenido.  Inicie sesión o comience su prueba gratuita.
JoVE Revista Ingeniería
Epitaxial Nanostructured α-Quartz Films on Silicon: From the Material to New Devices

Epitaxial Nanostructured α-Quartz Films on Silicon: From the Material to New Devices

5,220 Views

•

11:34 min

•

October 06, 2020

DOI:

10.3791/61766-v

DOI:
10.3791/61766-v

•

11:34 min
October 06, 2020

•

1 Views
, , , ,
1Institut d’Electronique et des Systemes (IES), CNRS,Université de Montpellier

Explore More Videos

EpitaxialNanostructuredAlpha-quartzSiliconQuartz-based SensorsMiniaturizationMonolithic IntegrationChemical IntegrationEpitaxial RequirementsMicrocantileversActive Microelectromechanical SystemLead-free Piezoelectric Oxide MaterialsMass SensitivityPDMSSOI SubstrateDip CoatingGel FilmMicro/nanostructure

Read Article

Cite this Article

Jolly, C., Sanchez-Fuentes, D., Garcia-Bermejo, R., Cakiroglu, D., Carretero-Genevrier, A. Epitaxial Nanostructured α-Quartz Films on Silicon: From the Material to New Devices. J. Vis. Exp. (164), e61766, doi:10.3791/61766 (2020).

Download .ris file

Copy

Share Video

.

Copy