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光子温度计的制作与测试

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Fabrication and Testing of Photonic Thermometers

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光子温度计的制作与测试

DOI:

10.3791/55807-v

•

08:44 min

•

October 24, 2018

•

Nikolai N. Klimov², Zeeshan Ahmed

¹Joint Quantum Institute,University of Maryland, ²Physical Measurement Laboratory,National Institute of Standards and Technology

Capítulos

00:04Título
01:16Device Fabrication
02:58Photonic Chip Alignment
04:28Photonic Chip Testing
05:00Bonding of the Optical Fibers
05:49Packaging of Photonic Thermometer and Temperature Measurement
06:47Results: Temperature Response of Photonic Sensor
07:39Conclusion

Summary

Traducción Automática

我们描述了光子温度计的制造和测试过程。

Tags

Photonic Thermometers Photonic Thermometry Frequency-based Measurements Temperature Metrology Optomechanical Temperature Standards SOI Wafer Fabrication E-beam Lithography ICP RIE Etching Photonic Chip Dicing V-groove Array Alignment

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