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Silikon Üzerine Epitaxial Nanoyapılı α-Kuvars Filmler: Malzemeden Yeni Cihazlara
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Kapitel
- 00:05Introduction
- 00:54Preparation of PDMS Templates and Gel Film Deposition on SOI Substrates by Dip-Coating
- 02:55Surface Micro/Nanostructuration by Soft Imprint Lithography and Gel Film Crystallization by Thermal Treatment
- 04:00Preparing and Patterning of the Quartz Samples for the Cantilever Microfabrication Process
- 08:49Results: Qualitative Analysis of the Progressive Epitaxial Nanostructured α-Quartz Film Thickness Developed on Silicon
- 10:20Conclusion
Bu çalışma, difleme kaplama yöntemi ile kuvars filminin epitaksiyel büyümesinden başlayarak silikon-on-insulatör (SOI) teknolojisi alt tabaka üzerinde nanoyapılı α-kuvars kantileatörün mikrofabrikasyonu ve daha sonra nanoimprint litografi ile ince filmin nanoyapılanması için ayrıntılı bir protokol sunun.
Tags
Keywords: EpitaxialNanostructuredAlpha-quartzSiliconQuartz-based SensorsMiniaturizationMonolithic IntegrationChemical IntegrationEpitaxial RequirementsMicrocantileversActive Microelectromechanical SystemLead-free Piezoelectric Oxide MaterialsMass SensitivityPDMSSOI SubstrateDip CoatingGel FilmMicro/nanostructure
