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Epitaxial nanostrukturerad α-kvartsfilmer på kisel: Från materialet till nya enheter

JoVE Journal
Ingenieurwesen

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JoVE Journal Ingenieurwesen

Epitaxial Nanostructured α-Quartz Films on Silicon: From the Material to New Devices

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Epitaxial nanostrukturerad α-kvartsfilmer på kisel: Från materialet till nya enheter

5,214 Views

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11:34 min

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October 06, 2020

DOI:

10.3791/61766-v

DOI:

10.3791/61766-v

•

11:34 min

October 06, 2020

•

1 Views

Claire Jolly, David Sanchez-Fuentes, Ricardo Garcia-Bermejo, Dilek Cakiroglu, Adrian Carretero-Genevrier

¹Institut d’Electronique et des Systemes (IES), CNRS,Université de Montpellier

Tags

Epitaxial Nanostructured Alpha-quartz Silicon Quartz-based Sensors Miniaturization Monolithic Integration Chemical Integration Epitaxial Requirements Microcantilevers Active Microelectromechanical System Lead-free Piezoelectric Oxide Materials Mass Sensitivity PDMS SOI Substrate Dip Coating Gel Film Micro/nanostructure

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