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Fabricação de dispositivos de onda acústica de superfície no niobato de lítio
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JoVE Journal Ingenieurwesen
Fabrication of Surface Acoustic Wave Devices on Lithium Niobate

Fabricação de dispositivos de onda acústica de superfície no niobato de lítio

11,117 Views

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07:55 min

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June 18, 2020

DOI:

10.3791/61013-v

DOI:
10.3791/61013-v

•

07:55 min
June 18, 2020

•

8 Views
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1Medically Advanced Devices Laboratory, Center for Medical Devices and Instrumentation, Department of Mechanical and Aerospace Engineering, Jacobs School of Engineering and Department of Surgery, School of Medicine,University of California San Diego

Tags

Surface Acoustic WaveLithium NiobateFabricationPhotoresistSpin CoatingUV ExposureRD6 DeveloperSputteringChromiumAluminum

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Cite this Article

Mei, J., Zhang, N., Friend, J. Fabrication of Surface Acoustic Wave Devices on Lithium Niobate. J. Vis. Exp. (160), e61013, doi:10.3791/61013 (2020).

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