1,983 Views
•
06:57 min
July 17, 2020
DOI:
10.3791/58897-v
Read Article
Cite this Article
Yako, M., Ishikawa, Y., Abe, E., Wada, K. Theoretical Calculation and Experimental Verification for Dislocation Reduction in Germanium Epitaxial Layers with Semicylindrical Voids on Silicon. J. Vis. Exp. (161), e58897, doi:10.3791/58897 (2020).
Download .ris file
Copy
Share Video
.