Journal
工程学
Deposition of Bi2Te3 and Sb2Te3 Thin Films on Glass Substrates via RF Sputtering

Deposition of Bi2Te3 and Sb2Te3 Thin Films on Glass Substrates via RF Sputtering

May 17, 2024

Author Spotlight: Advancements in High-Performance Thermoelectric Thin Films Through Radio Frequency Magnetron Sputtering

00:45 min
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Radio Frequency Magnetron Sputtering of Bi2Te3 and Sb2Te3 Thermoelectric Thin Films on Glass Substrates

03:39 min
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403 Views
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1Solar Energy Research Institute (SERI),Universiti Kebangsaan Malaysia, 2Faculty of Science and Technology,Universiti Sains Islam Malaysia

Summary

The manuscript describes a protocol for radio frequency magnetron sputtering of Bi2Te3 and Sb2Te3 thermoelectric thin films on glass substrates, which represents a reliable deposition method that provides a wide range of applications with the potential for further development.

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